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Rugged 02 microsensor

A rugged O.sub.2 microsensor constructed from Si, and Pt, Si.sub.3 N.sub.4 and ZrO.sub.2 thin films which is free standing and isolated from the silicon substrate in combination with a counter electrode and a heater in a bow-tie configuration. The sensor combines an integral heater made from platinum which is deposited on a silicon wafer as a thin film. The thin film heater heats a small yttria-stabilized zirconia sensor that sends a signal proportional to the amount of oxygen in the ambient environment through a counter electrode. The sensor and heater are supported on the silicon wafer by a thin layer of silicon nitride.

Patent Information

NumberUS  5282948
CountryUS
StatusIssued
Date02/01/1994


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