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| This novel cantilevered microbeam temperature sensor is free from the effects of residual or induced stress imposed on and used with standard “bridge-type” strain gauges. The microbeam is supported at one end, the other is free to oscillate relative to the substrate and is isolated from changes in strain caused from flexure of a diaphragm. The natural resonant frequency of the beam varies in response to changes in temperature. This occurs due to changes in the density and modulus of elasticity of the polysilicon microbeam in much the same manner as the resonant beam of a typical strain gauge. Therefore, the temperature-sensing device may be placed adjacent to a strain gauge, ensuring accurate temperature compensation. In addition, the sensor eliminates the need for analog-to-digital conversion, thereby simplifying circuitry.novel temperature compensation device designed resonant sensing circuits |
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