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| This low cost, opto-thermal sensing system has been designed to sense toxic gases. The highly manufacturable, micromachined sensor integrates a pulsing radiation source, a multilayer interference filter, a specially etched silicon wafer to maximize IR light, and a micromachined gas temperature sensor into a compact design. The sensing system operates in either a single or differential-output manner. A closed gas cell is not required--enabling faster response. In addition, the integrated sensor size is 10 to 100 times smaller than competing designs.novel integrated opto-thermal gas sensor |
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