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| This technology relates to a micromotion stage for use as a positioning mechanism in devices for fine positioning of objects, semiconductor production equipments, printing machines, scanning-tunneling microscopes and other such precision equipment. More particularly, this technology relates to detecting and controlling the position and attitude of a micromotion stage.micromotion stage proposed AIST links whose strokes controlled actuators constituted stacked piezoelectric elements stationary plate along edge three equally spaced connection points disposed offset 60 degrees Six extending contracting holders fixed capacitance type displacement gages retained parallel six target members part thereof face tip portion across small gap |
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