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| A new method for positioning an object in space is proposed in the present invention. This relates to a new positioning technology that has high value as a control technology for controlling devices and dimensional metrology relating to samples, parts and products in the precision machinery industry, in production of semiconductor devices and other electronic devices as well as in biotechnology and medicine. Moreover, since a single light source is used and the light paths used to form multiple interference fringes are virtually identical, the environmental characteristics are also good. The proposed apparatus in this invention has a simple structure, which is also one of the advantageous effects.FIG diagram illustrating principle sharpen profile lines fringes quasi white light interferometry accordance the present Superposing interference 21 22 neither large spectral band width produces intensification phase mutual cancellation opposite signal 23 sharper close amplitude center rapidly falls off side shows optical implementing spatial positioning low-coherence laser beam semiconductor collimation shown split probe reference reflected target object passes splitter focused lens 12 onto photoelectric element 13 guided scanning mirrors embodiment two beams equal intensity independently respective electrostrictive elements stage 19 supplied signals amplitudes 10 11 equivalent path concentrated together |
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