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| This technology is a positioning control apparatus and a precision positioning control method enabling high-precision positioning with high-speed response over a broad range of movement as required in machine tools, semiconductor production equipment, various types of surface profilers, data storage equipment and the like.precision positioning control apparatus coarse positioner displaced first adjusted command signal fine higher resolution second displacement totalizer totaling detection based output comparator error representing difference adjuster adjusting inputting transfer element limiter simulating response characteristic combination linear integrator integrating gain integrated adder adds outputs the steps detecting displacements comparing detected supplying coarse-fine coordinating type composite servo inputs adding value adjustment amount whereby need further prevents reaching displaceing (which dead zone) close responds stepwise exceeding rapidly homing-in target lost operation |
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