|
The yet2.com global technology marketplace lists intellectual property, technology, and patents for technology transfer, technology licensing, patent licensing and patent sale. As premier technology brokers, yet2.com offers this essential IP marketplace for technology owners, technology seekers, and technology brokers interested in technology acquisition, patent licensing, intellectual property licensing (IP licensing), and intellectual property transfer.
more...
|
| This is an abstract of a technology that is available for sale or license. yet2.com can introduce you confidentially to the owner of this technology. |
| To view the complete TechPak, please register with us. |
 |
| Enter a keyword or phrase below, and search now to find other technologies of interest. |
|
|
|
|
 |
| DuPont offers technology for dense-phase fluid (supercritical CO2-based) cleaning of integrated circuits that is especially useful for the rapidly growing copper interconnect approach. Key features of this technology include (1) methods of process optimization based on analyses of spent supercritical carbon dioxide cleaning formulations, (2) recovery and purification of CO2 from spent cleaning formulations involving co-solvents, (3) recycle of recovered carbon dioxide, (4) apparatus and methods for load-lock systems for use in dense-phase fluid cleaning tools, (5) formulations for removal of post-dry-etch residues and copper contamination, and (6) dense-phase fluid cleaning processes using two fluids at different pressures, where the higher-pressure fluid is applied locally using nozzles directed towards the surfaces to be cleaned |
|
|
 |
|
Interested? This is an abstract of a technology that is available for sale or license. yet2.com can introduce you confidentially to the owner of this technology.
|
|
To view the complete TechPak, please register with us.
|
|
|
|
