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| This is a resonance microscanner imparting high-speed vibration to a high precision micro mirror formed of single crystal silicon by MEMS (Micro Electro Mechanical System) technology. It achieves mirror significant surface flatness of 30mR or more, a mechanical deflection angle of ±25 degrees or more and resonant frequency of 3000Hz or more. Beyond that, the original airtight package structure achieves silent and stable operation, unaffected by changes in outside environments, such as humidity, barometric pressure and dust adhesion. The overall size will be 10mm x 10mm x 5mm with a weight of about 1g, depending on mirror size, etc. It can be used as an optical unit for printers and projectors, as an inter-vehicular distance sensor for automobiles, as an alarm sensor, as various other sensors, or can be applied to various measuring devices. |
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Interested? This is an abstract of a technology that is available for sale or license. yet2.com can introduce you confidentially to the owner of this technology.
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