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| Non-contact electro-optical measuring systems are advantageous over those using mechanical sensing, because of their relatively high speed and non-destructive capabilities. The increasing need for non-contact surface displacement and profile measurements has already led to the development of such electro-optical systems as those incorporating interferometry methods, speckle detection, Moire deflectometry, stereo vision, focus error detection, time of flight, confocal microscopy and structured light triangulation. Confocal microscopy and structured light triangulation are widely known methods for measuring surface profiles or displacements. Scanning confocal microscopes can measure surface profiles with high accuracy and in on-axis configuration which minimizes shadowing problems. However, the measurements are performed serially (point by point) and are therefore usually very slow. The structured light triangulation methods are the most wide-spread. They are suitable for industrial applications, in that they offer a simple and robust 3-D measurement. Structured light triangulation systems determine distance to an object by projecting thereon light from a source and imaging the projected pattern on to a detector. With the position of the image on the detector, the lateral separation between the detector lens and the light source, and the projection angle of the source being known, the distance to the object is determined. Sequential measurements at different coordinates on the object lead to a full 3-D image of the object's surface profile. This technology relates to non-contact optical measurements of surface profiles or displacements, and is particularly useful for three-dimensional sensing which requires high horizontal and vertical resolution of measurements over a wide range thereof.the present preferably 3-dimensional surface topography based either point-by-point measurements stripe scanning first case axially dispersing optics spherical focusing lens focuses incident light wavelengths points axis second cylindrical stripes colors (wavelengths) distances therefrom along rainbow sheet cases collimating disposed source collimated beam further focused corresponding lightThe off-imaging triangulation concept angle object illuminatedThe fast real time mapping depth measuring range horizontal resolution employed efficient tool factory automation inspection production mechanical parts electronic devices applications three |
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