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| The present invention relates to a multilevel diffractive optical element (DOE), in particular to a computer generated phase DOE, comprising a substrate with a substantially periodic transmissive or reflective relief pattern of phase retardation zones. Computer generated DOEs are capable of performing complicated phase transformations of a radiation wave incident thereon such as a conversion of incident radiation wavefront having one shape into a wavefront of any other shape. DOEs are usually designed to have a high diffraction efficiency at a predetermined first diffraction order. In order to obtain 100% diffraction efficiencies, DOEs known as kinoforms have a periodic blazed surface relief with phase zones having a continuous profile. However, it is practically very difficult to produce high quality kinoforms with properly shaped continuous blazed profile. It has, therefore, been suggested to quantize the ideal continuous phase profile of the DOEs into discrete phase levels as an approximation to the continuous profile. However, due to the fact that in such a multilevel DOE, all the phase zones have identical depth and number of phase levels, an amplitude of the diffracted wavefront cannot be changed independently of its phase and therefore, a desired distribution of overall diffraction efficiency of such a DOE cannot be achieved. It is the object of the present invention to provide a new computer generated multilevel phase DOE, in which local diffraction efficiencies and consequently an overall diffraction efficiency can be arbitrarily controlled in the range from 0 to nearly 100% over the entire element.present relates multilevel diffractive optical element (DOE) particular computer phase substrate periodic transmissive reflective relief pattern retardation zones |
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