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| This technology provides an easy and inexpensive method of manufacturing a high-performance piezoelectric element from an aluminum nitride thin film that exhibits no hillocks or cracks, and which does not peel off. The aluminum nitride thin film also exhibits superhigh c-axis orientation. The manufacturing technology enables the production of high-temperature vibration and acoustic sensors for use in gas turbines, jet engines, IC engines, nuclear power plants, and in other applications where reliability, resistance to high temperature, and resistance to vibration are paramount. Heat treatment causes conventional aluminum nitride thin film to peel off the electrode. This manufacturing method uses a stack consisting of a layer of zirconium oxide substrate, ruthenium, tungsten, and aluminum nitride which is exposed to heat treatment in 1450 degrees C for an hour in a high-purity argon atmosphere. No peeling occurs. The result is a high-performance piezoelectric vibration sensor.Aluminum nitride promising material efforts compact thinner piezoelectric elements (among factors) fabricability film aluminum needs oriented along c-axis flanked top bottom electrodes films superhigh orientation known monocrystal substrate generally polycrystalline directly renders difficult this technical problem |
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