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Partially Fluorinated Cyclic Polymers
This technology offered for non-exclusive license comprises a broad family of partially fluorinated polymers, monomers, and intermediates, processes for manufacturing them, and suitable applications. The monomers are derived from hexafluoroisobutylene epoxide(HFIBO) and/or tricyclononene (TCN). These broad families of partially fluorinated polymers, monomers, and intermediates have highly desirable properties. Many are thermally stable, highly transparent, and generally soluble in ordinary organic solvents, and, with suitable substitution, can be made aqueous base soluble or dispersible. The polymers described cover a broad range of glass transition temperatures making them suitable for many diverse applications. For example, polymers such as polyfluorinated polyethers and polyfluorinated acrylates containing a hydroxysubstituted hexafluoropropyl group that is derived from HFIBO are suitable for photoresist applications. Our partially fluorinated polymers derived from cycloolefins have very high glass transition temperatures suitable for photoresist, anti-reflective coatings, membranes, and other applications.HFIBO Synthesis epoxide hexafluoroisobutylene

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