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Electronic cross scan correction for a multi-beam laser writing system
One way of speeding up a laser writing system, is to use multiple beams that write information simultaneously. As a consequence, correction for small aberrations in the laser beam (e.g. of mechanical origin) is no longer possible by optical means. The technology proposed here provides an electronic correction instead and thus allows the simultaneous writing by multiple laser beams at the correct location of the image plane.increasing speed laser writing device beam write simultaneously scan lines position final location plane subject mechanically induced aberrations revolving polygon mirror often corrected optically lens

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