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Rapid DC Magnetron Sputtering

Provide positive validation of the coating design, deposition technology used, deposition run times and metrology data to support the claim that coated part meets or exceeds the coating specifications and operational requirements.<br/>Deliverables:<br/> Four coated 1.5" ULE substrates meeting all requirements<br/> Date/time-stamped run data to demonstrate deposition duration.<br/> Certified laser damage test results<br/> Metrology data confirming specification compliance of all requirements.<br/> Complete coating design<br/> Full description of deposition technique and coating chamber<br/> All deposition parameters<br/>

Precision optical coatings for high-damage-threshold mirrors for commercial, industrial, and defense applications.

OVERVIEWThis organization wants reduce magnetron sputtering deposition times (for example) 17 hours 2-3 5x 8x reduction BACKGROUNDDC durable stable coating high-energy laser (HEL) industrial applications coatings high-reflectivity (HR) mirrors anti-reflection (AR) coated windows aperture-sharing elements (ASEs) narrow-band pass filters broadband beam control beam-shaping opticsHowever extremely slow results long run translate increased cost 73-layer very-low-absorption very-high-damage-threshold approximately goal HrsThis seeking novel ways meeting performance requirements currently Three approaches considered following priority order1 alternative materials fewer numbers layers complex commensurate organizations chamber2 need practice chamber3 alternate demonstrate producibility speed maintaining optical thermal durability qualities sputtered coatingsOther CONSTRAINTSRequirements areSubstrate Mtl ULESubstrate Dia 15Reflectivity %R >999% 1064 (%R avg random linear polarization)%R >98% 045 09 average unpolarized light)Angle Incidence (AOI) degrees 18 degreesAbsorption (@ um) %A 100 PPM either polarizationPost-coated surface figure <1/10 wave (P-V across CLAP) 06328 um<1/50 (RMS Aspect ratio 101CLAP >90% diametric dimension 95%Scratch/Dig <20-10Surface Roughness Angstroms (RMS) coatingLaser Damage Threshold 1J/cm2 (5 desirable) 1064um 5nsec FWHM pulse width KHz rep minute Coatings environmental (humidity temperature adhesion abrasion) accordance MIL 48497APOSSIBLE SOLUTION AREASOptical Science Centers universities Research programs areas faculty graduate students Commercial precision vendorsCoating manufacturers dealing technologyCapitalize semiconductor industry architectural glass industries volume

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